New SVS Robotic Hand Changer for Semiconductor Processes

KOSMEK has introduced the new SVS Robotic Hand Changer for semiconductor processes.

Developed for precise automated tool and nozzle change, the SVS is a compact robot tool changer designed for applications where installation space is limited and repeatability is critical. It is suitable for semiconductor manufacturing equipment and supports reliable changeover directly at the equipment end.

The SVS is available for 1 kg and 7 kg payloads and offers repeatability of 5 μm. It also features KOSMEK’s patented Zero-Backlash Technology for high positioning accuracy and stable tool connection.

For clean semiconductor manufacturing environments, the SVS uses materials suitable for semiconductor applications, including stainless steel, aluminum, fluororubber sealing materials and low-dust grease. A rear gasket design supports internal piping, while the integrated vacuum port helps minimize small debris and particles.

With its compact design, reliable mechanical lock function and semiconductor-focused construction, the SVS expands the KOSMEK robotic hand changer portfolio for advanced factory automation.