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Precision Automation for Semiconductor Manufacturing

Precision. Reliability. Efficient Automation.

KOSMEK provides precision automation solutions for semiconductor manufacturing, from wafer production to front-end and back-end processes. Our compact products support precise positioning, secure clamping, quick changeovers and automated handling. Innovative technologies such as Zero-Backlash Technology help improve positioning accuracy, process stability and productivity.

KOSMEK compact, accurate clamping systems for delicate electronics and semiconductor production.

Front-end Process

To Slice Ingots

During silicon ingot slicing, stable workpiece support is essential for precise wafer manufacturing. KOSMEK High-Power Pneumatic Work Supports automatically stop their movement upon contact with the workpiece, providing strong support during machining.

Product Example:

  • High-Power Pneumatic Work Support (WNC)

View Semiconductor Solutions Catalog

Wire-saw system slicing a silicon ingot into wafers, with compact locating and clamping components highlighted near the rollers.

To Change Nozzle

During photoresist coating, precise positioning and quick nozzle changes are important for efficient semiconductor manufacturing. The KOSMEK Robotic Hand Changer (SWRY) enables automatic nozzle changes with high-precision locating and clamping, helping reduce setup times and improve process stability.

Product Example:

  • Robotic Hand Changer (SWRY)

View Semiconductor Solutions Catalog

Schematic of a coating head with interchangeable nozzle attachments for photoresist application in semiconductor manufacturing.

To Change Coater Head

Changing coater heads requires precise positioning and secure connections. KOSMEK Robotic Hand Changers feature patented Zero-Backlash Technology with 3 µm repeatability, enabling highly accurate and reliable tool changes. Combined with Air Location Clamps, they support stable positioning and efficient changeovers.

Product Example:

  • Air Location Clamp (SWT/SWQ)
  • Robotic Hand Changer (SWR)


View Semiconductor Solutions Catalog

Technical illustration of a removable coater head and two locating interfaces in semiconductor photoresist coating equipment.

For Locating during Setup

Accurate positioning of fixtures and workpieces is essential during semiconductor exposure equipment setup. KOSMEK Expansion Locating Pins provide high-precision locating through an expanding mechanism, supporting accurate alignment and reliable positioning. Pneumatic and manual versions are available to suit different automation requirements.

Product Examples:

  • Expansion Locating Pin (VRA/VRC)
  • Pneumatic Expansion Locating Pin (VWH/VWM)
  • Manual Expansion Locating Pin (VX)

View Semiconductor Solutions Catalog

Precision locating elements highlighted on a removable platform during setup of semiconductor exposure equipment.

For Docking Modules

During semiconductor etching and cleaning processes, docking modules require secure positioning and clamping for reliable equipment connections. KOSMEK High-Power Clamping Systems provide strong clamping forces in compact designs, supporting stable docking and efficient equipment operation.

Product Examples:

  • High-Power Pneumatic Pallet Clamp (WVS)
  • High-Power Automation Pallet Clamp (WVG)
  • High-Power Pull Stud Clamp (WPT)

View Semiconductor Solutions Catalog

Illustration of docking modules connecting a mobile supply unit to semiconductor etching and cleaning equipment.

For Fluid Supply

Reliable fluid connections are essential in semiconductor etching and cleaning equipment. KOSMEK Couplers enable automated connection and disconnection of fluid supply lines, supporting efficient equipment changeovers and reducing manual intervention.

Product Examples:

  • Leakless Coupler (JWC/D)
  • Auto Coupler (JTA/B, JV□ Series)
  • Compact Compressor (AYW)

View Semiconductor Solutions Catalog

Cross-sectional schematic of fluid couplings and internal supply channels for semiconductor etching and cleaning equipment.

Robotic Hands with 100% Stainless Steel

In Chemical Mechanical Polishing (CMP), robotic handling equipment must meet demanding requirements for cleanliness and reliable operation. KOSMEK Robotic Hands support efficient handling and flexible gripper designs. Customized stainless steel versions can be considered for applications with specific material and contamination requirements.

Product Example:

  • Robotic Hands (WP□ Series)

View Semiconductor Solutions Catalog

Technical drawing of a fork-shaped stainless steel robotic hand with a compact connection module for chemical mechanical polishing.

For Fluid Supply

Reliable fluid supply is essential for Chemical Mechanical Polishing equipment. KOSMEK Rotary Joints enable the transfer of various fluids between stationary and rotating components, supporting continuous fluid supply during equipment operation.

Product Example:

  • Rotary Joint (JR□ Series)

View Semiconductor Solutions Catalog

Cross-sectional diagram of a rotary coupling supplying fluid to a rotating stage in chemical mechanical polishing equipment.

To Change Testing Device Tool

During semiconductor wafer inspection, precise positioning and reliable tool changes are essential for accurate testing. KOSMEK Robotic Hand Changers and Pallet Grippers enable secure connections and efficient changeovers, while High-Power Pneumatic Work Supports provide stable support during testing operations. These solutions help reduce setup times and improve process stability.

Product Examples:

  • Robotic Hand Changer, Large Model (SWL)
  • Pallet Gripper (WVA)
  • High-Power Pneumatic Work Support (WNC)

View Semiconductor Solutions Catalog

Schematic of a semiconductor wafer inspection head with interchangeable testing components positioned above the wafer test area.

Back-end Process

Tool Change Automation

Automated tool changes in semiconductor grinding equipment support flexible production and reduce manual intervention. KOSMEK Robotic Hand Changers enable the automatic exchange of different end-effectors for tasks such as workpiece transfer and seal application. Zero-Backlash Technology provides precise, repeatable connections for reliable robotic automation.

Product Example:

  • Robotic Hand Changer (SWR)

View Semiconductor Solutions Catalog

Technical illustration of a wafer grinding machine showing a detachable coupling interface for automated tool change.

Lock Mechanism for the Stage Height

Precise stage positioning is important for stable operation in semiconductor dicing equipment. KOSMEK Pneumatic Work Supports securely hold the support rod after height adjustment, providing strong holding force and helping maintain the selected position during operation.

Product Example:

  • Pneumatic Work Support (WNA)

View Semiconductor Solutions Catalog

Wafer dicing stage with compact locking mechanisms highlighted underneath a rotating platform for stage height=

Change / Locate Fixture on Machine Side

Accurate fixture positioning is essential in semiconductor die bonding and wire bonding equipment. KOSMEK Screw Locators enable precise fixture changeovers with a locating repeatability of 3 µm. This supports consistent fixture positioning and reliable setup during semiconductor assembly processes.

Product Example:

  • Screw Locator (VXE/VXF)

View Semiconductor Solutions Catalog

Interchangeable fixture pallets A and B positioned on a common baseplate using locating components for die and wire bonding.

Clamp and Locate Molding Fixture

Secure clamping and accurate positioning are important for semiconductor molding fixtures. KOSMEK Pneumatic Clamps provide reliable workpiece holding, while Screw Locators ensure precise fixture positioning. Together, these solutions support stable molding processes and efficient fixture setup.

Product Examples:

  • Pneumatic Link / Swing Clamp (WCC/WFC/WHC)
  • High-Power Pneumatic Link / Swing Clamp (WCE/WHE)
  • Screw Locator (VXE/VXF)

View Semiconductor Solutions Catalog

Cross-sectional diagram showing locating elements and clamps aligning the upper and lower molds in semiconductor molding equipment.

Change Chuck Plate on Picker Robot

Automated chuck plate changes help improve flexibility in semiconductor molding equipment. KOSMEK Quick Chuck Changers enable simple and fast exchange of chuck plates on picker robots, reducing manual changeover effort and supporting efficient production.

Product Example:

  • Quick Chuck Changer (SXQ)

View Semiconductor Solutions Catalog

Exploded view of a detachable interface connecting the chuck plate to a picker robot in semiconductor molding.

Mold Loading

Efficient mold transfer and loading help reduce manual handling and improve equipment accessibility. KOSMEK Pre-Rollers and Pneumatic Free Roller Lifters support smooth mold movement during loading and unloading. Removable Pre-Rollers also help save space when they are not in use.

Product Examples:

  • Pre-Roller (MR Series)
  • Pneumatic Free Roller Lifter (RQC)

View Semiconductor Solutions Catalog

Diagram of mold loading=

Change Testing Device Tool

Precise positioning and secure clamping are essential for reliable semiconductor inspection and testing. KOSMEK Air Location Clamps and Compact Location Clamps enable accurate locating and clamping of testing devices, supporting repeatable setups and efficient tool changeovers.

Product Examples:

  • Air Location Clamp (SWT)
  • Compact Location Clamp (SWQ)

View Semiconductor Solutions Catalog

Schematic showing a testing tool being lowered onto semiconductor inspection equipment using locating and clamping components.

Mechanical Device

KOSMEK Smart Series Location Clamps use the mechanical force of a robot or transfer device for locating and clamping, without requiring a separate pneumatic or hydraulic actuation source. This supports simple integration into automated semiconductor inspection equipment.

Product Example:

  • Smart Series Location Clamp (KSL)

View Semiconductor Solutions Catalog

Lever-operated inspection fixture with KSL Location Clamps positioning a removable plate on a mechanical device.

Pressure Maintaining for Leak Test

Maintaining air pressure is important for reliable leak testing in semiconductor equipment. KOSMEK Leakless Couplers allow the outgoing side to retain air pressure even after disconnection, supporting efficient testing operations and reducing the need for continuous air supply during disconnected conditions.

Product Example:

  • Leakless Coupler (JWC/D)

View Semiconductor Solutions Catalog

Technical illustration of detachable coupling components used to maintain pressure during a semiconductor leak test.

FAQs

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The selection depends on the manufacturing process, required positioning accuracy, clamping or holding force, available installation space and operating environment. KOSMEK’s technical team can help evaluate these requirements and recommend suitable components for your semiconductor automation system.

KOSMEK can evaluate application-specific requirements such as materials, lubrication, operating temperatures, mounting conditions and automation interfaces. Our engineering team helps identify suitable standard products or potential special configurations for semiconductor equipment.

KOSMEK offers products and application-specific options for contamination-sensitive manufacturing environments. Depending on the model and requirements, stainless steel components, low-dust grease or other suitable specifications can be evaluated. Cleanroom suitability must be confirmed for the individual product and operating conditions. Contact KOSMEK to discuss your requirements.

KOSMEK offers Screw Locators, Expansion Locating Pins, Pneumatic Clamps and Work Supports for accurate positioning and secure holding. These components help maintain stable workpiece and fixture positions during wafer manufacturing, dicing, bonding, molding and inspection processes. Explore our Factory Automation solutions.

Yes. KOSMEK Robotic Hand Changers enable automated changes of tools and end effectors in semiconductor equipment. Applications include nozzle changes using the SWRY during photoresist coating, coater-head exchanges using the SWR and inspection tool changes. Precise connections support efficient changeovers and reduce manual intervention.

KOSMEK’s patented Zero-Backlash Technology eliminates mechanical play in robotic tool connections, enabling highly accurate and repeatable positioning. Selected Robotic Hand Changers achieve positioning repeatability of 3 µm, supporting reliable automated tool changes in precision semiconductor manufacturing equipment. Learn more about our Zero-Backlash Technology (Link).

KOSMEK provides automation components for wafer manufacturing, front-end and back-end semiconductor processes. Applications include photoresist coating, etching, cleaning, wafer inspection, dicing, die bonding, molding and testing. Our solutions support precise positioning, clamping, workpiece handling and automated tool changes. Explore our Semiconductor Solutions Catalog for application examples.

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Precision Matters in Semiconductor Manufacturing. Let's Find the Right Automation Solution.

From wafer manufacturing to front-end and back-end processes, KOSMEK supports equipment manufacturers and system integrators with solutions for precise positioning, secure clamping and automated tool changes. Tell us about your application and our team will help you identify suitable components.
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